Residual Gas Analyzer Using Miniature Quadrupole Array Mass Spectrometer
نویسندگان
چکیده
منابع مشابه
A microelectromechanical systems-enabled, miniature triple quadrupole mass spectrometer.
Miniaturized mass spectrometers are becoming increasingly capable, enabling the development of many novel field and laboratory applications. However, to date, triple quadrupole tandem mass spectrometers, the workhorses of quantitative analysis, have not been significantly reduced in size. Here, the basis of a field-deployable triple quadrupole is described. The key development is a highly minia...
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Two miniature mass spectrometer systems based on a microengineered quadrupole mass filter have been developed. One of the instruments has a footprint of 27 cm x 20 cm and is intended for laboratory use when space is at a premium. The other is portable and intended for use in the field. It is battery powered, weighs 14.9 kg, and is housed in a rugged case. This is the first example of a portable...
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In recent years, there has been a desire to scale down linear quadrupoles. The key advantages of this miniaturization are the portability it enables and the reduction of pump-power needed due to the relaxation on operational pressure. Various attempts at making MEMS-based linear quadrupoles have met with varying degrees of success [1]-[3]. Producing these devices involved some combination of pr...
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Stanford Research Systems phone: (408)744-9040 www.thinkSRS.com Modern-day contamination control requirements for gas phase processes are constantly pushing the limits of performance of quadrupole gas analyzers. The quadrupole technology is rapidly evolving and adapting to lower contamination level specifications. A good understanding of the various factors affecting the detection capabilities ...
متن کاملCalibration of a Quadrupole Gas Analyzer Using a Reference Gas*
A quadrupole gas analyzer system was calibrated for the gases H2, He, N2, 02, A, and Xe. The procedure involved first calibrating the system for argon, as the reference gas. This was done using conventional techniques. A mixture of the above gases was then introduced into the system to be calibrated. The system configuration was such that the ratio of the partial pressures of each of the test g...
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ژورنال
عنوان ژورنال: Vacuum and Surface Science
سال: 2019
ISSN: 2433-5835,2433-5843
DOI: 10.1380/vss.62.267